Development of MEMS component library with Modelica

Author

Hu, Wei ; Wei, Xin ; Xie, Xiaozhu

Author_Institution

Sch. of Mech. & Electron. Eng., Guangdong Univ. of Technol., Guangzhou, China

Volume

2

fYear

2010

fDate

22-24 Oct. 2010

Abstract

For rapid modeling and simulation of MEMS, a MEMS component library consisting of beam, anchor, plate and gap is developed with Modelica. The hierarchy structure of this library are proposed. In order to show micro component´s structure, pin definitions, parameters and behaviors of mechanical beam are analyzed and then the lumped parameter beam is modeled based on object-oriented method with Modelica. Simulation results of a cantilever beam show accordance with FEA simulations, which indicates that this model can achieve precision, efficiency, reusability and extensibility.

Keywords

anchors; beams (structures); cantilevers; finite element analysis; mechanical engineering computing; micromechanical devices; object-oriented methods; plates (structures); FEA simulations; MEMS component library; anchor; cantilever beam; hierarchy structure; lumped parameter beam; mechanical beam; micro component´s structure; object-oriented method; pin definitions; plate; rapid modeling; Analytical models; Micromechanical devices; MEMS library; Modelica; beam; model; objectoriented;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer Application and System Modeling (ICCASM), 2010 International Conference on

Conference_Location

Taiyuan

Print_ISBN

978-1-4244-7235-2

Electronic_ISBN

978-1-4244-7237-6

Type

conf

DOI

10.1109/ICCASM.2010.5620369

Filename

5620369