Triaxial accelerometer design based on meso-piezoresistive effect

With the theory of meso-piezoresistive effect, we design a high sensitivity piezoresistive triaxial accelerometer. A three-mass dual-beam geometric micro-structure cavity can be designed by using GaAs/AlAs/InGaAs RTS film as sensitive element. After theoretical analysis and calculation of the sensitivity of this accelerometer and having compared with conventional silicon micro-accelerometer, we know the piezoresistive sensitivity of the RTS film that possesses the meso-piezoresistive effect is higher than the ordinary bulk silicon material. Building a reasonable bridge circuit can enhance the output voltage signal, The design of the same geometric size double cantilever in three axes may achieve the equal precision measurement in any direction.