Title :
Measurements to establish process ESD compatibility
Author :
Steinman, Arnold ; Henry, Leo G. ; Hernandez, Marcos
Author_Institution :
Electron. Workshop, Berkeley, CA, USA
Abstract :
Currently, there are no standards for establishing equipment or process capability to handle devices of known ESD sensitivity. Correlating verification measurement tools with parameters of device testing is a first step. Measurements with a contacting high impedance voltmeter and ESD event detectors are compared to voltages and discharges of HBM and CDM testing.
Keywords :
electrostatic discharge; sensitivity analysis; testing; voltmeters; CDM testing; ESD event detectors; ESD sensitivity; HBM discharges; contacting high impedance voltmeter; device testing; process ESD compatibility; verification measurement tool correlation; Calibration; Current measurement; Detectors; Discharges; Electrostatic discharge; Testing; Voltage measurement;
Conference_Titel :
Electrical Overstress/ Electrostatic Discharge Symposium (EOS/ESD), 2010 32nd
Conference_Location :
Reno, NV
Print_ISBN :
978-1-58537-182-2
Electronic_ISBN :
978-1-58537-182-2
