Author :
Ladur, A.A. ; Maljutin, D.N. ; Fedotov, I.E.
Author_Institution :
Res. & Production Co. Micran, Tomsk, Russia
Abstract :
The microwave probes are developed for measurement systems of microcircuits on a wafer. The irregularities have been inserted into a tract of a probe to improve device characteristics.
Keywords :
microwave measurement; measurement systems; microcircuits; microwave probes; Companies; Electronic mail; Frequency dependence; Microwave devices; Microwave measurements; Probes; Springs;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5630862
