DocumentCode
533631
Title
Microwave module for noncontact measurement of semiconductors
Author
Vladimirov, V.M. ; Konnov, V.G. ; Markov, V.V. ; Martynovskiy, V.N. ; Repin, N.S. ; Shepov, V.N.
Author_Institution
Krasnoyarsk Sci. Centre, SB RAS, Krasnoyarsk, Russia
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
967
Lastpage
968
Abstract
Controlled microwave module for sensing of semiconductors is developed. The results of its application for measurement of minority-carrier lifetime in silicon are presented.
Keywords
carrier lifetime; elemental semiconductors; microwave measurement; minority carriers; silicon; Si; controlled microwave module; minority-carrier lifetime; semiconductor noncontact measurement; silicon; Microwave amplifiers; Microwave circuits; Microwave communication; Microwave filters; Microwave integrated circuits; Microwave measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5631197
Filename
5631197
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