DocumentCode
533788
Title
Measurement accuracy increase for nanodimensional systems parameters in near-field microwave microscopes
Author
Sorokin, A.N. ; Filatov, Yu.A.
Author_Institution
Balashov Inst., Saratov State Univ., Balashov, Russia
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
725
Lastpage
726
Abstract
The new approached method of reflection factor calculation for near-field microwave microscope is offered, it allows raising measurement accuracy of nanodimensional systems parameters.
Keywords
microscopes; microwave devices; nanotechnology; near-field scanning optical microscopy; measurement accuracy; nanodimensional systems parameters; near-field microwave microscopes; reflection factor calculation; Accuracy; Microwave measurements; Microwave theory and techniques; Nanoscale devices; Reflection; Scanning probe microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632568
Filename
5632568
Link To Document