Title :
Switchable bulk acoustic wave resonator based on ferroelectric films
Author :
Mikhailov, K.A. ; Ptashnik, V.S. ; Kozyrev, B.A.
Author_Institution :
St. Petersburg State Electrotech. Univ. (LETI), St. Petersburg, Russia
Abstract :
The calculation of eigen acoustic modes of multilayer microwave capacitance structure with thin ferroelectric films in paraelectric state is carried out. For estimation of excitation efficiency of bulk acoustic waves (BAW) by ferroelectric films the system of electromechanical equations is solved and spatial distribution of mechanical displacements in the structure is presented. Finally, the switch ability of eigen acoustic modes for novel switchable BAW resonator is discussed.
Keywords :
bulk acoustic wave devices; ferroelectric devices; resonators; eigen acoustic mode; electromechanical equation; mechanical displacement; multilayer microwave capacitance structure; paraelectric state; spatial distribution; switch ability; switchable BAW resonator; switchable bulk acoustic wave resonator; thin ferroelectric film; Acoustic waves; Capacitors; Ferroelectric films; Microwave filters; Microwave oscillators; Nonhomogeneous media;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632613
