Title :
Research of glass materials of micromechanical elements for VHF-devices
Author :
Timoshenkov, S.P. ; Minaev, V.S. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.
Author_Institution :
Moscow Inst. of Electron. Technol. (Tech. Univ.), Moscow, Russia
Abstract :
Results of research of glass materials of micro-electromechanical systems (MEMS) for VHF devices are submitted.
Keywords :
VHF devices; glass; micromechanical devices; MEMS; VHF-devices; glass materials; microelectromechanical systems; micromechanical elements; Annealing; Chemical elements; Chemicals; Crystals; Glass; Micromechanical devices;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632727
