• DocumentCode
    533929
  • Title

    Research of glass materials of micromechanical elements for VHF-devices

  • Author

    Timoshenkov, S.P. ; Minaev, V.S. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.

  • Author_Institution
    Moscow Inst. of Electron. Technol. (Tech. Univ.), Moscow, Russia
  • fYear
    2010
  • fDate
    13-17 Sept. 2010
  • Firstpage
    775
  • Lastpage
    776
  • Abstract
    Results of research of glass materials of micro-electromechanical systems (MEMS) for VHF devices are submitted.
  • Keywords
    VHF devices; glass; micromechanical devices; MEMS; VHF-devices; glass materials; microelectromechanical systems; micromechanical elements; Annealing; Chemical elements; Chemicals; Crystals; Glass; Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-7184-3
  • Type

    conf

  • DOI
    10.1109/CRMICO.2010.5632727
  • Filename
    5632727
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=533929