Title :
Express method of determination of the gas pressure optimal for microwave plasma chemical materials processing
Author :
Bordusov, S.V. ; Madveiko, S.I. ; Dostanko, A.P.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
Abstract :
A method of rapid determination of gas pressure value, which provides the most favorable conditions for microwave plasma chemical processing at low vacuum, is developed. The method is based on the characteristic property of microwave plasma materials processing which consists in pulsation nature of microwave discharge.
Keywords :
discharges (electric); plasma diagnostics; plasma materials processing; gas pressure optimal determination; microwave discharge nature; microwave plasma chemical materials processing; vacuum; Chemicals; Delay; Discharges; Materials; Microwave theory and techniques; Plasma properties;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632811
