A new method of estimating null time in ellipsometry

Author

Gao, Long ; Wang, Chunhui ; Li, Yanchao ; Cong, Haifang ; Qu, Yang

Author_Institution

Nat. Key Lab. of Tunable Laser Technol., Harbin Inst. of Technol., Harbin, China

Volume

5

fYear

2010

fDate

16-18 Oct. 2010

Firstpage

2461

Lastpage

2464

Abstract

A new method which can estimate the null time in the ellipsometry is developed in order to measure precisely the thickness and refractive index of thin film. Ten images are taken consecutively at the null time during the measurement, and ten sets of (P_i, A_i) value for the images are obtained. The gray scale matrices of different images are analyzed and transformed, then the real values of the (P_i, A_i) for the sample are determined. Distribution of the thickness and the refractive index of the sample are presented. The measurement accuracy for thickness and refractive index are 1 nm and 0.01, respectively.

Keywords

ellipsometry; matrix algebra; refractive index; thin films; ellipsometry; gray scale matrices; null time estimation method; refractive index; thin film; Accuracy; Ellipsometry; Fluctuations; Measurement uncertainty; Refractive index; Thickness measurement; Uncertainty; Ellipsometry; grayscale measurement; monolayer film; null method;

fLanguage

English

Publisher

ieee

Conference_Titel

Image and Signal Processing (CISP), 2010 3rd International Congress on

Conference_Location

Yantai

Print_ISBN

978-1-4244-6513-2

Type

conf

DOI

10.1109/CISP.2010.5647838

Filename

5647838