Title :
Laser ablation of polyimide thin films
Author :
Damaceanu, Mariana-Dana ; Rusu, Radu-Dan ; Olaru, Mihaela ; BRUMA, Maria
Author_Institution :
“Petru Poni” Inst. of Macromolecular Chem., Romanian Acad., Iasi, Romania
Abstract :
Thin films made from fluorinated poly(naphthyl-imide)s containing oxadiazole rings were irradiated with UV-laser of various fluences and their morphology before and after laser ablation was investigated by using various spectroscopy techniques such as FTIR, atom force, and time-resolved emission spectroscopy.
Keywords :
Fourier transform spectra; infrared spectra; laser ablation; polymer films; polymer structure; time resolved spectra; FTIR; UV-laser irradiation; atom force spectroscopy; fluorinated poly(naphthyl-imide); laser ablation; morphology; oxadiazole rings; polyimide thin films; time-resolved emission spectroscopy; Films; Laser ablation; Plastics; Polyimides; Radiation effects; Ring lasers; Surface emitting lasers; AFM; cone-like structure; laser ablation; oxadiazole ring; poly(naphthyl-imide)s;
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5650460
