Title :
Model prediction based dual-stage actuator control
Author :
Choong Woo Lee ; Cheol-Soon Kim ; Sang Min Suh
Author_Institution :
Semicond. Div., Samsung Electron., Suwon, South Korea
Abstract :
This note presents a new control mechanism based on a model prediction for fast settling times without overshoots in the dual-stage actuator (DSA) systems. Since the VPES based on model prediction is calculated in the proposed method, VPES is more precise and no scaling factor is required. From the test results, both time and frequency responses are apparently improved.
Keywords :
actuators; frequency response; motion control; prediction theory; VPES; dual stage actuator control; frequency responses; model prediction; Actuators; Variable speed drives; Dual-stage actuator; model prediction; motion control; relative contribution;
Conference_Titel :
APMRC, 2010 Digest
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-8103-3