• DocumentCode
    539358
  • Title

    Robust design with direct product of the L18 orthogonal arrays

  • Author

    Kuramochi, N. ; Oomuro, Y.

  • Author_Institution
    Microelectronics Center, Toshiba Corporation, Kawasaki, Kanagawa 212-8583, Japan
  • fYear
    2008
  • fDate
    27-29 Oct. 2008
  • Firstpage
    191
  • Lastpage
    194
  • Abstract
    Optimization on process parameters for super junction fabrication was examined according to L18×L18 experimental design using TCAD. This design enabled to evaluate tolerance effect on control factors as well as main factor effect simultaneously. Nearly-orthogonal array was applied for noise factor allocation to reduce run size.
  • Keywords
    Fabrication; Fluctuations; Impurities; Noise; Robustness; Sensitivity; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2008 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • ISSN
    1523-553X
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • Filename
    5714875
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=539358