Title :
Robust design with direct product of the L18 orthogonal arrays
Author :
Kuramochi, N. ; Oomuro, Y.
Author_Institution :
Microelectronics Center, Toshiba Corporation, Kawasaki, Kanagawa 212-8583, Japan
Abstract :
Optimization on process parameters for super junction fabrication was examined according to L18×L18 experimental design using TCAD. This design enabled to evaluate tolerance effect on control factors as well as main factor effect simultaneously. Nearly-orthogonal array was applied for noise factor allocation to reduce run size.
Keywords :
Fabrication; Fluctuations; Impurities; Noise; Robustness; Sensitivity; Tin;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
Electronic_ISBN :
1523-553X
