DocumentCode
539361
Title
Going green with on-site generated fluorine: Sustainable cleaning agent for CVD processes
Author
Stockman, Paul ; Shuttleworth, Greg
Author_Institution
Linde Electronics, 1575 Mountain Avenue, Murray Hill, NJ 07974, USA
fYear
2008
fDate
27-29 Oct. 2008
Firstpage
355
Lastpage
358
Abstract
On-site generated fluorine meets the sustainability requirements for the future of CVD thin-film process chamber cleaning. Rigorous industry safety standards are maintained, GWP and total carbon footprint impacts are greatly reduced, and significant process improvements are available.
Keywords
Cleaning; Gases; Hafnium; Plasmas; Production; Safety; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714878
Link To Document