DocumentCode
539372
Title
Fully automation control system for golden super hot lot in 300mm Fab
Author
Wu, De-Lung ; Lo, Hsi-Lo ; Pan, Cheng-Chung
Author_Institution
Rexchip Semiconductor Corp., NO.429-1, SANFONG RD., HOULI TOWNSHIP, TAICHUNG COUNTY, CENTRAL TAIWAN SCIENCE PARK, TAIWAN, R.O.C.
fYear
2008
fDate
27-29 Oct. 2008
Firstpage
99
Lastpage
102
Abstract
This paper purpose is for the highest priority super hot lot (golden lot) to reduce its cycle time. We develop the system called as advanced golden super hot lot management system. This system is already implemented in the REXCHIP 300mm Fab. The purpose of project is to use automated method to shorten lot cycle time to verify the process and speed up product pilot run period. After fully automation control system implemented in our 300mm Fab, our project got good results. The golden lot average output cycle time from 30 days to 16 days. The cycle time reduced about 47%. The benefits of the project are that decrease the influence to the bottleneck tool lowest and the process´s verification become more speed.
Keywords
Automation; Dispatching; Electronic mail; Forecasting; Manufacturing; Mathematical model; Real time systems; cycle time; golden lot; golden-line; real time dispatcher; super hot lot;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714893
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