DocumentCode
539379
Title
Manual Material Handling System
Author
Chen, Wen Cheng ; Chiou, Noah ; Lu, J.Y. ; Yeh, Jonathan ; Kuan, Jessica
Author_Institution
Taiwan Semiconductor Manufacturing Company, Ltd., 9, Creation Rd. 1, Hsinchu Science Park, Taiwan 300-77, R.O.C.
fYear
2008
fDate
27-29 Oct. 2008
Firstpage
152
Lastpage
154
Abstract
In the semiconductor manufacturing industry, wafers are transported from machine to machine via Automatic Material Handling System (AMHS) without human intervention in a 12-inch fabrication (fab) plant. However, wafers are transported by men in 8-inch fab. Transportation by men is both time consuming and inefficient due to work cells layout and complicated routes. This paper will describe a system called Manual Material Handling System (MMHS) for transporting wafers with high efficiency and speed. After implementing the system in various 6-inch and 8-inch fabs, it has been proved to be working properly and robustly.
Keywords
Humans; Layout; Loading; Manuals; Manufacturing; Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714900
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