DocumentCode :
539381
Title :
Optimal load allocation method for keeping target TAT - application of Nonlinear Programming -
Author :
Ono, Akira ; Kitamura, Shoichi ; Mori, Kazuyuki
Author_Institution :
Manufacturing System Technology Dept., Renesas Technology Corp., 4-1, Mizuhara Itami-City Hyogo, 664-0005 Japan
fYear :
2008
fDate :
27-29 Oct. 2008
Firstpage :
159
Lastpage :
162
Abstract :
For high-mix and small product Fab that includes hot-lot and normal lot, the target TAT( Turn Around Time) of hot-lot is shorter than normal product. Each process is available to limited tools because the tool is used for production and development. This paper proposes a new optimal load allocation method, for keeping TAT and throughput of Fab, and shows results of verification for effectiveness of this method by using simulation.
Keywords :
Data models; Load modeling; Optimization; Production; Programming; Resource management; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
ISSN :
1523-553X
Electronic_ISBN :
1523-553X
Type :
conf
Filename :
5714902
Link To Document :
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