Title :
BEOL parametric variation control with FDC data
Author :
Matsuhashi, Hideki ; Bai, Jenny ; Xie, Weldom ; Fernandez, Patrick ; Ngo, Luong ; Huron, Gilles ; Herndon, Michael ; Besnard, Jerome ; Williamson, Mike ; Graves, Spencer ; Akiya, Nobuchika ; Yu, Michael ; Jensen, Jim
Author_Institution :
PDF Solutions, Inc., 333 West San Carlos Street, Suite 700, San Jose, CA, 95110, U.S.A.
Abstract :
Parametric variation control was simulated using key FDC sensors identified through multivariate modeling of Back End Of Line (BEOL) process equipment in a 65nm mass production line. The simulation results suggest potential opportunities for reducing parametric variation which can reduce parametric yield loss. This methodology is enabled by a centralized data management infrastructure that consolidates disjointed FDC sensor data into a single database.
Keywords :
Copper; Databases; Predictive models; Radio frequency; Semiconductor device modeling; Temperature sensors;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
Electronic_ISBN :
1523-553X
