APC - The consequent next step

A high performing process control system is the key for facing the challenges in chip manufacturing for automotive industry. Increasing requirements on products and product quality drive the evolution of standards for process control. A lot of effort is spent by Infineon to bring its process control systems to perfection. Historically, the four disciplines FDC (Fault detection and classification), R2R (Run to Run control), Sensors and Metrology are used more or less separately to work on specific problems on semiconductor processing equipment and semiconductors. Every of these disciplines have its own advantages and disadvantages and its own target window in a wafer fab.