Title :
A Small Thickness Measurement System Based on PSD and FPGA
Author :
Jingming, Guo ; Xin, He ; Zhonghui, Wei ; Yanxiong, Wu
Author_Institution :
Changchun Inst. of Opt., Fine Mech. & Phys., Chinese Acad. of Sci., Changchun, China
Abstract :
Considering that the requirement of industrial manufacture, a small thickness measurement system based on PSD and FPGA is presented. It takes S3931 PSD of one dimension as position detection device, which is made by Hamamatsu in Japan, A FPGA produces logic control signals for the whole system, An AT89S51 single chip works as the core processor of the system. By two laser triangulation, the small displacement is converted to differential voltages, and after amplification and A/D transformation, 8-bit parallel data is send to single chip from FPGA by external interrupts, and the final calculation results output to the LCD display module. After digital micro meter calibration, we get the small thickness. Experiments show that the detection accuracy of the system is not less than 10um.
Keywords :
field programmable gate arrays; liquid crystal displays; measurement by laser beam; position sensitive particle detectors; thickness measurement; AT89S51; FPGA; LCD display module; PSD; industrial manufacture; laser triangulation; logic control signals; position detection device; thickness measurement; Calibration; Field programmable gate arrays; Measurement by laser beam; Pollution measurement; Semiconductor device measurement; Surface emitting lasers; Thickness measurement; FPGA(Field Programmable Gate Array); Interrupt; Laser Triangulation Measurement; PSD (Position Sensitive Detector); Small Thickness;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on
Conference_Location :
Shangshai
Print_ISBN :
978-1-4244-9010-3
DOI :
10.1109/ICMTMA.2011.71