Preparation and Property Analysis of Hydrophobic Zinc Oxide Films

Author

Li Chen ; Li Min

Author_Institution

Beijing Univ. of Aeronaut. & Astronaut., Beijing, China

Volume

2

fYear

2011

fDate

6-7 Jan. 2011

Firstpage

910

Lastpage

913

Abstract

In this research, zinc oxide films were prepared on glass substrates by hydrothermal synthesis and metal-organic chemical vapor deposition (MOCVD) respectively. A nanostructured layer of flurocarbon compounds with low surface energy was formed on the films by low-temperature dielectric barrier discharge plasma enhanced chemical vapor deposition (DBD-PECVD), in order to enhance the hydrophobicity of the films. Scanning electron microscopy (SEM) and contact angle analyzer were used to characterize the surface morphology, structure and hydrophobicity of these samples. The influence of preparation methods and conditions on the properties of hydrophobic zinc oxide films were discussed based on the experimental data.

Keywords

II-VI semiconductors; MOCVD; contact angle; hydrophobicity; nanofabrication; plasma CVD; scanning electron microscopy; semiconductor growth; semiconductor thin films; surface energy; wide band gap semiconductors; zinc compounds; DBD-PECVD; MOCVD; SEM; SiO₂; ZnO; contact angle analyzer; dielectric barrier discharge plasma enhanced chemical vapor deposition; flurocarbon compounds; glass substrates; hydrothermal synthesis; metal-organic chemical vapor deposition; nanostructured layer; property analysis; scanning electron microscopy; surface energy; surface morphology; zinc oxide film hydrophobicity enhancement; Films; Rough surfaces; Substrates; Surface morphology; Surface roughness; Surface treatment; Zinc oxide; DBD-PECVD; MOCVD; hydrophobicity; hydrothermal synthesis; zinc oxide film;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference on

Conference_Location

Shangshai

Print_ISBN

978-1-4244-9010-3

Type

conf

DOI

10.1109/ICMTMA.2011.510

Filename

5721336