Application Technology of MEMS Inertial System

The testing system based MEMS inertial devices is a kind special measurement system which is integrated with MEMS inertial sensor, ASIC and its corresponding software. Because of having merits such as small bulk, low cost, light weight, high reliability, and anti-harsh environments, it is widely used in the military and civil fields, especially suited for the high-g guided ammunition, but use what material and how to package, are the greatest challenge for these systems in high-g application. In this study, we first analyzed the character of the common packaging materials in detail, then combined with the projectile application, gave the method of choosing the proper packaging materials, and introduced its correct packaging process, finally carried out the high-g tests by using the hammer impact experiment desk and the projectile. It was found that the system can successful survived at high-g environment, this indicated that the system based MEMS inertial sensors can be used in high-g application field by choosing appropriate packaging material and using corresponding packaging craft.