Title :
Modern multifunctional measuring systems
Author :
Druzhinin, Anatoly ; Khoverko, Yuriy ; Vuitsyk, Andriy ; Berezhanskiy, Evgen
Author_Institution :
Semicond. Electron. Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
Multichannel measuring system based on strain, pressure and temperature sensors on the basis of silicon-on-insulator (SOI) structures and Si1-xGex whiskers has been made. Schematic diagram for their ETHERNET network integration using programmed hardware solutions has been proposed.
Keywords :
pressure sensors; silicon-on-insulator; strain sensors; temperature sensors; Ethernet; multichannel measuring system; multifunctional measuring systems; pressure sensors; programmed hardware; silicon-on-insulator; strain sensors; temperature sensors; Distortion measurement; Intelligent sensors; Semiconductor device measurement; Sensor systems; Temperature measurement; Temperature sensors; ETHERNET; Measuring system; SOI - structure; Si1−xGex whiskers;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
