• DocumentCode
    542452
  • Title

    Modern multifunctional measuring systems

  • Author

    Druzhinin, Anatoly ; Khoverko, Yuriy ; Vuitsyk, Andriy ; Berezhanskiy, Evgen

  • Author_Institution
    Semicond. Electron. Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
  • fYear
    2011
  • fDate
    23-25 Feb. 2011
  • Firstpage
    153
  • Lastpage
    154
  • Abstract
    Multichannel measuring system based on strain, pressure and temperature sensors on the basis of silicon-on-insulator (SOI) structures and Si1-xGex whiskers has been made. Schematic diagram for their ETHERNET network integration using programmed hardware solutions has been proposed.
  • Keywords
    pressure sensors; silicon-on-insulator; strain sensors; temperature sensors; Ethernet; multichannel measuring system; multifunctional measuring systems; pressure sensors; programmed hardware; silicon-on-insulator; strain sensors; temperature sensors; Distortion measurement; Intelligent sensors; Semiconductor device measurement; Sensor systems; Temperature measurement; Temperature sensors; ETHERNET; Measuring system; SOI - structure; Si1−xGex whiskers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
  • Conference_Location
    Polyana-Svalyava
  • Print_ISBN
    978-1-4577-0042-2
  • Type

    conf

  • Filename
    5744411
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=542452