DocumentCode
542473
Title
Information subsystem of quality assurence technology for IC and MEMS industry
Author
Tkachenko, Nataliya
Author_Institution
Software Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2011
fDate
23-25 Feb. 2011
Firstpage
20
Lastpage
21
Abstract
The industrial production process is analyzed. Information, what accompanies the general production cycle is analyzed. Identified the structure of the information sub-system for quality indexes monitoring.
Keywords
ISO standards; integrated circuit manufacture; micromechanical devices; production engineering computing; quality assurance; IC industry; ISO 9000; MEMS industry; industrial production process; information subsystem; production cycle; quality assurance technology; quality indexes monitoring; quality management systems; Indexes; Organizations; Process control; Production; Protocols; Quality management; Standards organizations; Quality; parameter; process; standards ISO 9000; technological process;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location
Polyana-Svalyava
Print_ISBN
978-1-4577-0042-2
Electronic_ISBN
978-966-2191-17-2
Type
conf
Filename
5744432
Link To Document