Title :
Macromodels of Micro-electro - mechanical systems (MEMS)
Author :
Anatolii, Petrenko A I
Author_Institution :
Inst. of the Appl. Syst. Anal., NTUU KPI, Kiev, Ukraine
Abstract :
Four automatic methods to generate MEMS reduced order macromodels, being based on full FEM/FDM models, are considered in this paper and compared.
Keywords :
finite difference methods; finite element analysis; micromechanical devices; reduced order systems; FDM model; FEM model; MEMS reduced order macromodels; micro-electro-mechanical systems; Computational modeling; Equations; Finite element methods; Integrated circuit modeling; Mathematical model; Micromechanical devices; Reduced order systems;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
