Title :
Surface stress effect on parameters of surface acoustic wave devices
Author :
Melnychuk, Andrii ; Matviykiv, Mykhailo
Author_Institution :
Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In this paper surface stress effect on parameters of surface acoustic wave devices is suggested.
Keywords :
stress analysis; surface acoustic wave devices; mechanical stress; surface acoustic wave device; surface stress; Solids; Stress; Surface acoustic wave devices; Surface acoustic waves; surface acoustic wave; surface acoustic wave device parameter; surface stress;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
