Title :
Cantilever array of mechanical type
Author :
Dupak, Bohdan ; Lobur, Mykhaylo
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In this work examined the cantilever arrays are used in nanotechnology.
Keywords :
cantilevers; microfabrication; nanotechnology; cantilever array; mechanical type; nanotechnology; Arrays; Force; Microscopy; Resonant frequency; Surface topography; Surface treatment; Vertical cavity surface emitting lasers; atomic force microscopy; cantilever array; position-sensitive detector; scanning force microscopy (SFM);
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
