DocumentCode
542545
Title
Cantilever array of mechanical type
Author
Dupak, Bohdan ; Lobur, Mykhaylo
Author_Institution
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2011
fDate
23-25 Feb. 2011
Firstpage
388
Lastpage
389
Abstract
In this work examined the cantilever arrays are used in nanotechnology.
Keywords
cantilevers; microfabrication; nanotechnology; cantilever array; mechanical type; nanotechnology; Arrays; Force; Microscopy; Resonant frequency; Surface topography; Surface treatment; Vertical cavity surface emitting lasers; atomic force microscopy; cantilever array; position-sensitive detector; scanning force microscopy (SFM);
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location
Polyana-Svalyava
Print_ISBN
978-1-4577-0042-2
Electronic_ISBN
978-966-2191-17-2
Type
conf
Filename
5744505
Link To Document