DocumentCode
542550
Title
The model of MEMS analysis with the use of functional Petri Nets theory
Author
Denysyuk, Pavlo ; Teslyuk, Vasyl
Author_Institution
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2011
fDate
23-25 Feb. 2011
Firstpage
397
Lastpage
398
Abstract
The presented MEMS model on the basis of functional Petri Nets for analysis of tasks at projection system level.
Keywords
Petri nets; micromechanical devices; MEMS analysis model; functional Petri nets theory; projection system level; Analytical models; Design automation; Information processing; Information technology; Micromechanical devices; Petri nets; Solid modeling; MEMS; Petri Nets; information technology;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location
Polyana-Svalyava
Print_ISBN
978-1-4577-0042-2
Electronic_ISBN
978-966-2191-17-2
Type
conf
Filename
5744510
Link To Document