Micro and nano device — Customer-Oriented Product e-Engineering in e-CoFrame

Author

Bieniek, Tomasz ; Janczyk, Grzegorz ; Grabiec, Piotr ; Szynka, Jerzy ; Kalicinski, Stanislaw ; Janus, Pawel

Author_Institution

Div. of Silicon Microsyst. & Nanostruct. Technol., Inst. Technologii Elektronowej, Warszawa, Poland

fYear

2010

fDate

27-29 Oct. 2010

Firstpage

1

Lastpage

5

Abstract

This paper discusses novel approach to micro device product engineering. The main objective is a customer-oriented methodology based on a real sample of MEMS vibration sensor engineering flow. Multi-site product development, virtual prototyping, rapid virtual wafer run with extended customer support and feedback are discussed. Specific set of software tools is also defined. Methodology visualization and it validation by the reference to real MEMS inertial sensor fabrication process are also presented.

Keywords

customer services; micromechanical devices; nanotechnology; product development; production engineering computing; virtual prototyping; MEMS inertial sensor fabrication process; MEMS vibration sensor engineering flow; customer-oriented product e-engineering; e-CoFrame; micro device product engineering; multisite product development; nano device; rapid virtual wafer run; software tools; virtual prototyping; Corona; Fabrication; Micromechanical devices; Product development; Semiconductor device modeling; Silicon; Solid modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

eChallenges, 2010

Conference_Location

Warsaw

Print_ISBN

978-1-4244-8390-7

Type

conf

Filename

5756535