Title :
Micro and nano device — Customer-Oriented Product e-Engineering in e-CoFrame
Author :
Bieniek, Tomasz ; Janczyk, Grzegorz ; Grabiec, Piotr ; Szynka, Jerzy ; Kalicinski, Stanislaw ; Janus, Pawel
Author_Institution :
Div. of Silicon Microsyst. & Nanostruct. Technol., Inst. Technologii Elektronowej, Warszawa, Poland
Abstract :
This paper discusses novel approach to micro device product engineering. The main objective is a customer-oriented methodology based on a real sample of MEMS vibration sensor engineering flow. Multi-site product development, virtual prototyping, rapid virtual wafer run with extended customer support and feedback are discussed. Specific set of software tools is also defined. Methodology visualization and it validation by the reference to real MEMS inertial sensor fabrication process are also presented.
Keywords :
customer services; micromechanical devices; nanotechnology; product development; production engineering computing; virtual prototyping; MEMS inertial sensor fabrication process; MEMS vibration sensor engineering flow; customer-oriented product e-engineering; e-CoFrame; micro device product engineering; multisite product development; nano device; rapid virtual wafer run; software tools; virtual prototyping; Corona; Fabrication; Micromechanical devices; Product development; Semiconductor device modeling; Silicon; Solid modeling;
Conference_Titel :
eChallenges, 2010
Conference_Location :
Warsaw
Print_ISBN :
978-1-4244-8390-7
