Development of solid-based modeling system for surface micromachined MEMS

Author

Li, Jianhua ; Liu, Yusheng ; Ling, Hao ; Guo, Weibin ; He, Gaoqi

Author_Institution

Dept of Comput. Sci. & Eng., East China Univ. of Sci. & Technol., Shanghai, China

Volume

2

fYear

2011

fDate

11-13 March 2011

Firstpage

297

Lastpage

301

Abstract

Although a lot of CAD systems and tools have developed for MEMS, there does not appear to be a means for solid-based modeling. In this paper, a modeling system based on three-dimensional solid model for surface micromachined devices is developed. The system consists of three main modules: fast process simulation and material-based process simulation; automatic mask synthesis based on solid model; collaborative modeling to support design refinement. Based on a solid modeling core ACIS, the system is implemented in VC++ and some test results are given. The system helps MEMS designers work in a more intuitive mode.

Keywords

C++ language; micromechanical devices; power system CAD; CAD system; VC++; automatic mask synthesis; material based process simulation; solid-based modeling system; surface micromachined MEMS; Collaboration; Design automation; Micromechanical devices; Object oriented modeling; Solid modeling; Surface treatment; Three dimensional displays; CAD; Collaborative modeling; MEMS; Surface micromachining;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer Research and Development (ICCRD), 2011 3rd International Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-61284-839-6

Type

conf

DOI

10.1109/ICCRD.2011.5764136

Filename

5764136