Title :
Characterization of a high-Q on-chip transmission line for CMOS MMIC applications
Author :
Fahimnia, M. ; Mohammad-Taheri, M. ; Biglarbeigian, B. ; Safavi-Naeini, S.
Author_Institution :
Univ. of Waterloo, Waterloo, ON, Canada
Abstract :
A high quality factor transmission line structure with shielded ground plane and curved side-walls is proposed for CMOS MMIC applications. The structure is optimized, fabricated and characterized up to 40 GHz. Instead of conventional open, short and thru de-embedding methods which occupies a large chip area, a simple yet accurate de-embedding method using lines with different lengths is employed. Simulated and measured data are compared which shows are in good agreement. The extracted line parameters are studied and it is seen that even with the shielded ground; the quality factor of the line degrades at very high frequency due to the substrate loss.
Keywords :
CMOS integrated circuits; Q-factor; field effect MIMIC; high-frequency transmission lines; CMOS MMIC applications; curved side-walls; deembedding methods; frequency 40 GHz; high quality factor transmission line structure; high-Q on-chip transmission line; shielded ground plane; CMOS integrated circuits; CMOS technology; Fabrication; MMICs; Q factor; Silicon; Transmission line measurements; CMOS; Microwave integrated circuit (MMIC); Q (quality factor); Transmission line (TL);
Conference_Titel :
Electrical Engineering (ICEE), 2011 19th Iranian Conference on
Conference_Location :
Tehran
Print_ISBN :
978-1-4577-0730-8
Electronic_ISBN :
978-964-463-428-4
