Title :
Hierarchical Petri nets use for MEMS modeling
Author :
Denysyuk, Pavlo ; Teslyuk, Vasyl ; Vasyliuk, Iaroslav ; Kobenko, Tatiana
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The developed model for analysis of MEMS structures based on hierarchical Petri nets is presented. Results of analysis are presented.
Keywords :
Petri nets; micromechanical devices; MEMS modeling; MEMS structure analysis; hierarchical Petri nets; Analytical models; Computational modeling; Design automation; Micromechanical devices; Object oriented modeling; Petri nets; Solid modeling; MEMS; Petri Nets; model;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
