DocumentCode
548231
Title
Hierarchical Petri nets use for MEMS modeling
Author
Denysyuk, Pavlo ; Teslyuk, Vasyl ; Vasyliuk, Iaroslav ; Kobenko, Tatiana
Author_Institution
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2011
fDate
11-14 May 2011
Firstpage
3
Lastpage
4
Abstract
The developed model for analysis of MEMS structures based on hierarchical Petri nets is presented. Results of analysis are presented.
Keywords
Petri nets; micromechanical devices; MEMS modeling; MEMS structure analysis; hierarchical Petri nets; Analytical models; Computational modeling; Design automation; Micromechanical devices; Object oriented modeling; Petri nets; Solid modeling; MEMS; Petri Nets; model;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location
Polyana
Print_ISBN
978-1-4577-0639-4
Electronic_ISBN
978-966-2191-18-9
Type
conf
Filename
5960248
Link To Document