Topology analysis of scanning microscope images with structural entropy and discrete wavelet transform

Author

Nagy, Szilvia ; Fehér, András

Author_Institution

Dept. of Telecommun., Szechenyi Istvan Univ., Gyor, Hungary

fYear

2011

fDate

16-18 June 2011

Firstpage

1

Lastpage

3

Abstract

Topology free structure of scanning electron microscopy images of heat treated, metallized compound semiconductor surfaces are studied using structural entropy based analysis. The scale dependence and the possible superstructures are determined by wavelet transforming the images before the localization type detection. The studied images are taken in-situ during a thermalization experiment, using GaAs as a substrate and gold, zinc and SiO₂ layers of 60 to 100 nm thickness.

Keywords

III-V semiconductors; discrete wavelet transforms; entropy; gallium arsenide; gold; heat treatment; image processing; metallisation; physics computing; scanning electron microscopy; silicon compounds; surface structure; topology; zinc; discrete wavelet transform; gold; heat treatment; localization type detection; metallized compound semiconductor surfaces; scale dependence; scanning electron microscopy images; scanning microscope images; size 100 nm; size 60 nm; structural entropy based analysis; superstructures; thermalization experiment; topology analysis; topology free structure; wavelet transforming; zinc; Entropy; Gallium arsenide; Pixel; Topology; Wavelet analysis; Wavelet transforms;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Signals and Image Processing (IWSSIP), 2011 18th International Conference on

Conference_Location

Sarajevo

ISSN

2157-8672

Print_ISBN

978-1-4577-0074-3

Type

conf

Filename

5977396