DocumentCode :
549371
Title :
Effect of MOVPE growth conditions on the formation of self-organized InAs/InGaAsP/InP quantum dots
Author :
Wenning, Felix ; Kuenzel, Harald ; Pohl, Udo W.
Author_Institution :
Fraunhofer Inst. for Telecommun., Heinrich-Hertz-Inst., Berlin, Germany
fYear :
2011
fDate :
22-26 May 2011
Firstpage :
1
Lastpage :
4
Abstract :
Structural characteristics of uncapped InAs/InGaAsP dots were evaluated based on a simple approach using image processing of atomic-force micrographs. Height, mean area, ensemble density, and shape of the dots were determined. On this basis a systematic study of the effect of growth temperature and growth interruption as the main parameters that influence the formation of the dots was performed. With a PL analysis of buried QDs deposited in the same run with the same growth conditions a correlation between optical and structural characteristics was developed. On this basis comparison of modelled transition energies with experimental data was made possible.
Keywords :
III-V semiconductors; MOCVD; atomic force microscopy; buried layers; gallium arsenide; indium compounds; photoluminescence; self-assembly; semiconductor growth; semiconductor quantum dots; vapour phase epitaxial growth; AFM; InAs-InGaAsP-InP; MOVPE growth conditions; PL analysis; atomic-force micrographs; buried QD; dot shape; ensemble density; growth interruption; growth temperature; image processing; mean area; optical characteristics; self-organized InAs-InGaAsP-InP quantum dot formation; structural characteristics; transition energies; uncapped InAs-InGaAsP dots; Correlation; Epitaxial growth; Indium phosphide; Optical device fabrication; Optical imaging; Optical sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Compound Semiconductor Week (CSW/IPRM), 2011 and 23rd International Conference on Indium Phosphide and Related Materials
Conference_Location :
Berlin
Print_ISBN :
978-1-4577-1753-6
Electronic_ISBN :
978-3-8007-3356-9
Type :
conf
Filename :
5978375
Link To Document :
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