A variable-speed scanning method for AFM fast imaging

In conventional atomic force microscope (AFM) systems, the scanner is moving with uniform speed which has low time efficiency and can not achieve fast imaging required by modern nanotechnology. To improve its performance, a variable-speed scanning (VSS) method is presented in this paper. Specifically, under this manner, the scanning speed can be tuned online according to the feedback information. Furthermore, a guideline is proposed for fast judging of steady state and design of scanning trajectory. Finally, several groups of contrast simulation and experiments are conducted to verify the effectiveness of the proposed algorithm. The simulation and experiment results show that the VSS method can distribute the scanning time properly by employing sample characteristic, then enhance the image speed remarkably while keeping the image quality. Therefore, this novel imaging strategy can complete fast and accurate imaging of highly developing nanotechnology.