High precision control for nano-positioner actuated by smart materials

Author

Chen Xinkai

Author_Institution

Shibaura Inst. of Technol., Saitama, Japan

fYear

2011

fDate

22-24 July 2011

Firstpage

6099

Lastpage

6104

Abstract

The nano-positioner is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the positioner is a challenging task. This paper discusses the high precision adaptive control for the positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Keywords

adaptive control; control nonlinearities; hysteresis; intelligent materials; nanopositioning; piezoelectric actuators; Prandtl-Ishlinskii model; global stability; high precision adaptive control; hysteretic nonlinearity; nano-positioner; piezo electric actuators; positioning mechanism; smart materials; Actuators; Adaptation models; Density functional theory; Force; Hysteresis; Mathematical model; Stability analysis; High Precision Control; Hysteresis; Nano-Positioner; Piezo Electric Actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference (CCC), 2011 30th Chinese

Conference_Location

Yantai

ISSN

1934-1768

Print_ISBN

978-1-4577-0677-6

Electronic_ISBN

1934-1768

Type

conf

Filename

6000858