Multi-degree-of-freedom motion control of ultra-precision stage

In this paper, a ultra-precision multi-degree-of-freedom stage is introduced, which consists of fine-stage based on Lorentz planar motor and rough-stage based on linear motor, and is suspended with air bearings. Based on the structure of stage, the dynamic model of fine-stage is designed, and the strategy of decouple control is presented correspondingly. A control method rough-stage following fine-stage is designed to satisfy the long stroke and high-precision performances. The above method is argued by field experiments, which demonstrates that the structure of stage and the control method can realize the performances of high-speed, long stroke and ultra-precision.