Title :
Optically controllable emitter array with pn-junction integrated Si tip
Author :
Tanaka, Yujiro ; Miyashita, Hidetoshi ; Tomono, Eiichi ; Esashi, Masayoshi ; Ono, Takahito
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this paper, a Si field emitter array with an ability of the optical switching of electron emission has been developed. Each emitter has pn junction at the apex to control emission current optically. Experiments of optical switching of electron emission have been demonstrated successfully. This concept of the optical control of emission can reduce the number of metal wires on the emission device; therefore, a high density emitter array can be achieved.
Keywords :
electron beam lithography; field emitter arrays; optical switches; p-n junctions; silicon; Si; electron beam lithography; electron emission; field emitter array; optical switching; optically controllable emitter array; pn-junction integrated Si tip; Arrays; Electrodes; Junctions; Logic gates; Optical switches; Silicon; Stimulated emission; electron emission; emitter array; microfabrication; multi electron beam lithography; optical control;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending