DocumentCode :
551330
Title :
A theoretical calculation of the electrical characteristics of the NFESE Microscopy
Author :
Kyritsakis, A. ; Xanthakis, J.P. ; Kirk, T.L. ; Pescia, D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Tech. Univ. of Athens, Athens, Greece
fYear :
2011
fDate :
18-22 July 2011
Firstpage :
89
Lastpage :
90
Abstract :
In the Near Field Scanning Electron Microscopy recently developed the tip of the microscope is placed a few tens of nm away from the anode. Measurements of voltage with respect to the tip-anode distance at constant current have been taken by Kirk et al. We have used a 3-dimensional WKB approximation to simulate these measurements. Our results are consistently 5-10 volts below the experimental ones. This was attributed to a thin WO3 layer on the tip which we have not taken into account.
Keywords :
scanning electron microscopy; voltage measurement; 3-dimensional WKB approximation; NFESE microscopy; Near Field Scanning Electron Microscopy; constant current; electrical characteristics; emission current; field emission; thin WO3 layer; tip-anode distance; voltage measurements; Approximation methods; Current measurement; Electric potential; Ellipsoids; Kirk field collapse effect; Scanning electron microscopy; Field emission; NFESEM; WKB approximation; emission current;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
ISSN :
pending
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending
Type :
conf
Filename :
6004576
Link To Document :
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