Title :
A functional tiny electron gun for a true microcolumn
Author :
Koike, Akifumi ; Fujino, Takahiro ; Neo, Yoichiro ; Mimura, Hidenori ; Yoshida, Tomoya ; Nishi, Takashi ; Nagao, Masayoshi ; Murata, Hidekazu
Author_Institution :
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
Abstract :
Abstract - We have designed and fabricated a novel triple-gated electron beam gun capable of generating a parallel electron beam. The beam profile was measured by the slit weeping method and we have confirmed the formation of parallel beam.
Keywords :
electron beam lithography; electron guns; functional tiny electron gun; parallel electron beam; slit weeping method; triple-gated electron beam gun; true microcolumn; Anodes; Current measurement; Electron beams; Focusing; Lenses; Logic gates;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending
