Title :
Generation of low-aberration beams of electrons based on nanosized Si-sponge field emission cathodes
Author :
Semenenko, M. ; Evtukh, A. ; Steblova, O. ; Litovchenko, V. ; Yilmazoglu, O. ; Hartnagel, H.L. ; Pavlidis, D.
Author_Institution :
V.Ye. Lashkaryov Inst. for Semicond. Phys., Nat. Acad. of Sci. of Ukraine, Kiev, Ukraine
Abstract :
The electron field emission from Si-sponge nanostructures prepared by galvanic anodization of a Si wafer at low current density has been investigated. The reproducible resonant peaks have been revealed at the field emission induction and their origin was attributed with the Lorentzian dependence transmission functions. The sizes of the Si-quantum well and the SiO2 barrier have been estimated by simulating of the energy distribution spectra of FE electrons within the resonance transitions and are 1.5-2.8 nm and 2 nm, respectively.
Keywords :
aberrations; anodisation; cathodes; current density; electron beams; electron field emission; galvanising; nanostructured materials; semiconductor quantum wells; vacuum microelectronics; FE electrons; Lorentzian dependence transmission functions; current density; electron field emission; energy distribution spectra; field emission induction; galvanic anodization; low-aberration beams; nanosized silicon-sponge field emission cathodes; reproducible resonant peaks; resonance transitions; silicon-quantum well; silicon-sponge nanostructures; Current density; Electron beams; Etching; Iron; Nanostructures; Silicon;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending