Title :
Electron emission of laser-structured carbon nanowalls on Si and stainless steel substrates
Author :
Jain, H. Gaur ; Hartmann, N. ; Buck, V. ; Serbun, P. ; Navitski, A. ; Müller, G.
Author_Institution :
Fac. of Phys., Univ. of Duisburg-Essen & CeNIDE, Duisburg, Germany
Abstract :
Carbon nanowalls (CNWs) were fabricated on Si and stainless steel substrates by inductively coupled plasma enhanced chemical vapor deposition. Aluminum acetylacetonate was used as metalorganic precursor in the presence of Ar without catalyst. Structuring of the CNW layers was successfully performed with a pulsed power laser. The resulting cathodes exhibited fairly aligned and efficient field emission (FE) at onset fields for 1 nA of 10-20 V/μm. Local FE measurements of selected CNW patches revealed promising maximum current values up to about 100 μA.
Keywords :
carbon; electron field emission; nanofabrication; nanostructured materials; plasma CVD; C; Si; aluminum acetylacetonate; cathodes; electron field emission; inductively coupled plasma enhanced chemical vapor deposition; laser-structured carbon nanowalls; metalorganic precursor; pulsed power laser; silicon substrates; stainless steel substrates; Argon; Cathodes; Iron; Silicon; Steel; Substrates; carbon nanowalls; field emission; laser structuring;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending