DocumentCode :
551354
Title :
Electron emission of laser-structured carbon nanowalls on Si and stainless steel substrates
Author :
Jain, H. Gaur ; Hartmann, N. ; Buck, V. ; Serbun, P. ; Navitski, A. ; Müller, G.
Author_Institution :
Fac. of Phys., Univ. of Duisburg-Essen & CeNIDE, Duisburg, Germany
fYear :
2011
fDate :
18-22 July 2011
Firstpage :
139
Lastpage :
140
Abstract :
Carbon nanowalls (CNWs) were fabricated on Si and stainless steel substrates by inductively coupled plasma enhanced chemical vapor deposition. Aluminum acetylacetonate was used as metalorganic precursor in the presence of Ar without catalyst. Structuring of the CNW layers was successfully performed with a pulsed power laser. The resulting cathodes exhibited fairly aligned and efficient field emission (FE) at onset fields for 1 nA of 10-20 V/μm. Local FE measurements of selected CNW patches revealed promising maximum current values up to about 100 μA.
Keywords :
carbon; electron field emission; nanofabrication; nanostructured materials; plasma CVD; C; Si; aluminum acetylacetonate; cathodes; electron field emission; inductively coupled plasma enhanced chemical vapor deposition; laser-structured carbon nanowalls; metalorganic precursor; pulsed power laser; silicon substrates; stainless steel substrates; Argon; Cathodes; Iron; Silicon; Steel; Substrates; carbon nanowalls; field emission; laser structuring;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
ISSN :
pending
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending
Type :
conf
Filename :
6004601
Link To Document :
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