An integrated MEMS vacuum diode

MEMS processing technologies have been used to create a wide variety of devices, including photonic crystals and microfluidic structures. These methodologies were adapted to fabricate an in situ vacuum sealed cold-cathode diode. Cathodes were formed from arrays of tungsten-clad silicon tips. Tungsten anodes, separated by a sacrificial film, were fabricated above each tip, within a vacuum microcavity. Initial test data are consistent with Fowler-Nordheim behavior, with an on/off current ratio of nearly 7 decades in forward bias.