Title :
Nano-diamond film pressure sensor
Author :
Zhang, Xiuxia ; Shuyi, Wei ; Wang, Erlei ; Zhang, Lixia ; Lu, Bingheng
Author_Institution :
Sch. of Electron. & Inf. Eng., North Nat. Univ., Yinchuan, China
Abstract :
The edges and corners of nanocrystalline diamond were natural field-emitters. Nano-graphite was mixed in nanocrystalline diamond and cellulose or other organic vehicles to fabricate paste for screen-printed film. The aim of mixed nano-graphite to enhance electric conduction of Nano-diamond film. Through enough ultrasonic disperse the nano-diamond, the paste was screen-printed on the substrates to form Nano-diamond film (NDF). The sintering process and post-treatment of Nano-diamond film were tested. SEM images showed that the surface morphology of NDF was improved, and the nano-diamond emitters were exposed from NDF through the special thermal-sintering technique and post-treatment process. The field-emission characteristics of Nano-diamond film were tested and analyzed. Finally, a pressure sensor based on field-emission of Nano-diamond film was designed. Result of MATLAB simulation indicated that the change curve of dJ/dS with dF/dS was linear.
Keywords :
diamond; field emission; mathematics computing; nanosensors; nanostructured materials; pressure sensors; scanning electron microscopy; sintering; surface morphology; thin films; C; MAtlab simulation; NDF; Nano-graphite; SEM images; electric conduction; field-emitters; nanocrystalline diamond film pressure sensor; organic vehicles; post-treatment process; screen-printed film; surface morphology; thermal-sintering technique; Cathodes; Diamond-like carbon; Films; MATLAB; Surface morphology; Surface treatment; Field-emission; MATLAB simulation; Pressure sensor; nano-diamond film (NDF);
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location :
Wuppertal
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending