Electron optical system and image processing

High-resolution transmission electron microscope provides a powerful tool to study the materials structure down to atomic level. However, as an electron optical system, the condition of obtaining projected structure image of examined samples is severe because of the lens aberration effect. A posterior image processing technique, the image deconvolution, can restore the image distortion due to the lens aberrations and enhance the image resolution up to the information limit of the microscope. The principle of the image deconvolution technique is briefly presented. The results of application to the study of hetero-interfacial defects at atomic level are given.