Title :
Higher stability of silicon-based thin-film solar cell fabricated by LAPECVD
Author :
Chang, Chih-Hsiang ; Lee, Ching-Ting
Author_Institution :
Inst. of Microelectron., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
Silicon-based thin-film solar cells were deposited using novel designed LAPECVD system. The conversion efficiency degradation of the Staebler-Wronski Effect (SWE) was effectively improved due to the microcrystalline structure and the lower hydrogen bonds concentration.
Keywords :
crystal microstructure; elemental semiconductors; hydrogen bonds; plasma CVD; semiconductor growth; semiconductor thin films; silicon; solar cells; LAPECVD system; Si; Staebler-Wronski effect; conversion efficiency degradation; hydrogen bond concentration; microcrystalline structure; silicon-based thin-film solar cell; Lasers;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9
