Title :
Resonance tuning of photonic micro/nano cavities with integrated MEMS/NEMS actuators
Author :
Zhou, Guangya ; Chew, Xiongyeu ; Chau, Fook Siong
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
We present dynamic and reversible tuning of photonic resonance using both nano-probe-based evanescent field perturbation and coupled-cavity approaches with on-chip integrated microactuators. Large resonant wavelength shift is experimentally demonstrated with low losses.
Keywords :
microactuators; microcavity lasers; nanoelectromechanical devices; coupled cavity approaches; dynamic photonic resonance tuning; integrated MEMS actuators; integrated NEMS actuators; nanoprobe based evanescent field perturbation; on chip integrated microactuators; photonic microcavities; photonic nanocavities; reversible photonic resonance tuning; Cavity resonators; Couplings; Optical resonators; Optical waveguides; Photonics; Q factor; Tuning;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2011 16th
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-288-2
Electronic_ISBN :
978-986-02-8974-9