DocumentCode
554501
Title
Research on micro-electro-mechanical system computer aided design
Author
Wang Xiaoyu ; Yu Linghui ; Xie Song
Author_Institution
R&D Center, DFH Satellite Ltd. Co., Beijing, China
Volume
3
fYear
2011
fDate
12-14 Aug. 2011
Firstpage
1556
Lastpage
1559
Abstract
Micro-electro-mechanical system (MEMS) feature coupling of multiple energy domains, integration of multiple discipline, and mixing of analogy and digital signals. Therefore, the design of MEMS must recur to computer aided design (CAD). Aiming at the characteristic and the unique design method of MEMS, a design flow is proposed for MEMS CAD. Meanwhile, a structured layering designed method is constructed, and some key technologies are discussed.
Keywords
micromechanical devices; technology CAD (electronics); MEMS CAD; MEMS feature coupling; analogy signals; digital signals; microelectromechanical system computer aided design; multiple energy domain; structured layering designed method; Computational modeling; Design automation; Design methodology; Integrated circuit modeling; Micromechanical devices; Software; Solid modeling; CAD; MEMS; key technology; structured layering designed method;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location
Harbin, Heilongjiang, China
Print_ISBN
978-1-61284-087-1
Type
conf
DOI
10.1109/EMEIT.2011.6023393
Filename
6023393
Link To Document