Study on micro-electric machine system and resonance beam style sensor

The micro-electric machine system is introduced, analyzed and researched in this paper. The relative introduction of the commercialization development process of the sensor is carried out too. The work principle of resonance beam style sensor and the superiority is discussed and deducted in detail in this paper. Through the theoretical analysis, we find that the work performance of resonance beam style sensor is more suitable than silicon piezoresistive sensor and the capacitive sensor in some aspects. At last, the temperature performance analysis of resonance beam style sensor is carried out by the means of finite element method. Through the analysis results, we find that the work performance of the resonance beam style sensor presents ideal tendency of linear variation under 240°C temperature. But, when the temperature is over the 240°C temperature, the work performance of the resonance beam style sensor presents obvious nonlinear variation characteristics. So, in the real work environment, the temperature of the resonance beam style sensor should be controlled fewer than 240°C.