Fabrication of optical fiber integrated micro-fluidic chips system by MEMS technology

With MEMS (Micro-Electro-Mechanical System processing technique, a PDMS+PDMS+GLASS three layer microfluidic chip was designed and fabricated. In addition, a whole system used for the detection and separation of biological sample was established based on the chip. By separating FITC-labeled amino within 150s, it was proved that the system was low cost, high sensitivity and simple operation. Meanwhile, the influence of parameters on separation speed was studied. The experiments showed that velocity and channel length had a significant influence on separation speed, while the effect of concentration was not obvious. However, when the concentration of sample was reduced to a certain extent, it was difficult for the system to separate and detect. The Minimum detectable concentration of the system was about 0.1 μL.